The Micro-Nano-Mechanical Systems Cleanroom Laboratory at the University of Illinois Urbana-Champaign offers research and development services in the design and fabrication of small-scale mechanical systems. The laboratory provides cleanroom facilities for microfabrication, inspection, and testing of devices, including lithography, etching, deposition, analysis, and general equipment. Staff at MNMS Cleanroom are available for device fabrication research, offering fabrication approach suggestions, direct manufacturing, and testing services. The focus is on devices employing nano-to-microscale mechanisms and their integration into meso-scale devices, supporting research in micro- and nano-electro-mechanical systems (MEMS & NEMS) and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS).